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Aixtron SE, widely known as Aixtron, is a leading global innovator in semiconductor machinery manufacturing. Headquartered in Herzogenrath, Germany, the company maintains a significant worldwide presence, delivering cutting-edge solutions across major operational regions. Established in 1983 as a spin-off from RWTH Aachen University, Aixtron has decades of experience pioneering advanced deposition technologies.
The company specialises in developing and supplying state-of-the-art MOCVD, PECVD, and ALD equipment. These highly precise systems are crucial for manufacturing advanced compound semiconductors and novel materials, enabling next-generation electronics. Aixtron's technology is pivotal for innovations in Micro LED displays, high-efficiency power electronics, advanced 5G components, and artificial intelligence applications, securing its position as a key industry enabler.
+26 vs industry average
Aixtron’s score of 70 is higher than 100% of the industry. This can give you a sense of how well the company is doing compared to its peers.
Semiconductor Machinery Manufacturing has typical carbon intensity
The Semiconductor Machinery Manufacturing industry has reduced its overall emissions by 39% since 2018
Scope 3 accounts for ••• of total emissions.
AIXTRON, a German semiconductor machinery manufacturer, is committed to reducing its carbon emissions and has set ambitious climate targets.
In 2025, AIXTRON's total carbon emissions are projected to be about 461.9 million kg CO2e. This includes approximately 127,000 kg CO2e from Scope 1 emissions, 270,000 kg CO2e from market-based Scope 2 emissions, and about 461.5 million kg CO2e from Scope 3 emissions. A significant portion of its Scope 3 emissions in 2025 comes from the use of sold products, accounting for approximately 422.9 million kg CO2e.
Looking back, AIXTRON's reported total emissions were about 493.7 million kg CO2e in 2024 and approximately 426.3 million kg CO2e in 2023. In 2022, total emissions were around 380.3 million kg CO2e. The company reported a significant decrease in total emissions between 2019 and 2020, with a reduction of almost 52%, from approximately 4.2 million kg CO2e in 2019 to about 2.0 million kg CO2e in 2020 for Scope 1 and Scope 2 combined.
AIXTRON has set both near-term and long-term Science Based Targets initiative (SBTi) validated targets. For its near-term goals, AIXTRON commits to reducing absolute Scope 1 and 2 GHG emissions by 60.0% by 2034 from a 2023 base year. Additionally, it aims to reduce absolute Scope 3 GHG emissions by 40.0% within the same timeframe. These near-term targets are classified as consistent with a 1.5°C warming pathway.
For its long-term ambitions, AIXTRON is committed to achieving net-zero greenhouse gas emissions across its entire value chain by 2045. This includes a commitment to reduce absolute Scope 1 and 2 GHG emissions by 95.0% by 2045 from a 2023 base year, and to reduce absolute Scope 3 GHG emissions by 95.0% within the same long-term period. These long-term targets are also classified as consistent with a 1.5°C warming pathway. The company has submitted a Letter of Commitment to the Science Based Targets initiative (SBTi).
AIXTRON's transition plan to achieve its climate targets aligns with the Paris Agreement and focuses primarily on reducing Scope 3 emissions, particularly from the use of sold products through efficiency improvements. It also includes measures to further optimise Scope 1 and Scope 2 emissions, such as the use of Guarantees of Origin for renewable electricity and the implementation of waste heat recovery systems. The company also highlights its Clean Energy Project, aiming to largely replace CO2-intensive energy sources like district heating and natural gas at its production sites.
2045
95% reduction in Scope 1
AIXTRON SE commits to reduce absolute scope 1 GHG emissions 95.0% by 2045 from a 2023 base year.
2045
95% reduction in Scope 2
AIXTRON SE commits to reduce absolute scope 2 GHG emissions 95.0% by 2045 from a 2023 base year.
2034
60% reduction in Scope 2
AIXTRON SE commits to reduce absolute scope 2 GHG emissions by 60.0% by 2034 from a 2023 base year.
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Common questions about Aixtron’s sustainability data and climate commitments
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