Mks Instruments
MKS Instruments, Inc., a leader in the semiconductor machinery manufacturing industry, is headquartered in the United States. Founded in 1961, the company has established itself as a key player in providing advanced solutions for the semiconductor, industrial, and life sciences markets. MKS offers a diverse range of core products, including pressure and flow control systems, vacuum solutions, and analytical instruments, all designed to enhance precision and efficiency in manufacturing processes.
With a strong presence in major operational regions across North America, Europe, and Asia, MKS Instruments has achieved significant milestones, including numerous innovations that have set industry standards. The company’s commitment to quality and technological advancement has solidified its market position, making it a trusted partner for businesses seeking reliable and cutting-edge manufacturing solutions.
-3 vs industry average
Mks Instruments’s score of 32 is lower than 43% of the industry. This can give you a sense of how well the company is doing compared to its peers.
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Industry Intensity
Semiconductor Machinery Manufacturing has typical carbon intensity
Industry performance
The Semiconductor Machinery Manufacturing industry has reduced its overall emissions by 39% since 2018
Emissions trajectory 2020 – 2027
Reported emissions
Scope 3 accounts for ••• of total emissions.
Mks Instruments's reported carbon emissions
MKS Instruments, headquartered in the US and operating within the Semiconductor Machinery Manufacturing industry, reported approximately 2.83 billion kg CO2e in total emissions for 2024. This figure encompasses Scope 1, 2, and 3 emissions. In 2024, Scope 1 emissions were about 7.25 million kg CO2e, while Scope 2 emissions, using the market-based approach, totalled approximately 57.12 million kg CO2e. The majority of emissions, about 2.76 billion kg CO2e, fall under Scope 3, with the use of sold products being the largest contributor at approximately 2.12 billion kg CO2e, followed by purchased goods and services at about 548.13 million kg CO2e.
For 2023, MKS Instruments reported a total of approximately 2.24 billion kg CO2e. Scope 1 emissions were around 6.85 million kg CO2e, and Scope 2 emissions (market-based) were approximately 57.89 million kg CO2e. Scope 3 emissions for 2023 totalled about 2.18 billion kg CO2e, with use of sold products accounting for approximately 1.53 billion kg CO2e and purchased goods and services at about 568.41 million kg CO2e.
In 2022, total emissions were approximately 4.84 billion kg CO2e, comprising Scope 1 emissions of about 8.21 million kg CO2e, Scope 2 emissions (market-based) of approximately 58.95 million kg CO2e, and a substantial Scope 3 total of about 4.76 billion kg CO2e. The use of sold products was the largest component of Scope 3, at approximately 3.87 billion kg CO2e, followed by purchased goods and services at about 765.50 million kg CO2e.
MKS Instruments has made significant climate commitments, including a pledge to reduce its combined Scope 1 and 2 greenhouse gas (GHG) emissions by 42% by 2030, using 2022 as a baseline. These targets are recognised by the Science Based Targets initiative (SBTi) as being aligned with a 1.5°C pathway. Additionally, the company commits that by 2030, 69% of its suppliers and customers, by emissions, covering purchased goods and services and the use of sold products, will also have science-based targets.
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Mks Instruments’s Climate Goals (2030 & 2050)
2 goals2030
42% reduction in Scope 1
MKS Inc commits to reduce absolute scope 1 GHG emissions 42.0% by 2030 from a 2022 base year.
2030
42% reduction in Scope 2
MKS Inc commits to reduce absolute scope 2 GHG emissions 42.0% by 2030 from a 2022 base year.
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Scope 3 top emissions categories
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Climate initiatives

Science Based Targets Initiative

Carbon Disclosure Project
The Climate Pledge
UN Global Compact Climate Champions initiative
RE 100
Climate Action 100
Emissions comparison with industry peers
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Common questions about Mks Instruments’s sustainability data and climate commitments
Data year: 2024
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