Mks Instruments
MKS Instruments, Inc., a leader in the semiconductor machinery manufacturing industry, is headquartered in the United States. Founded in 1961, the company has established itself as a key player in providing advanced solutions for the semiconductor, industrial, and life sciences markets. MKS offers a diverse range of core products, including pressure and flow control systems, vacuum solutions, and analytical instruments, all designed to enhance precision and efficiency in manufacturing processes.
With a strong presence in major operational regions across North America, Europe, and Asia, MKS Instruments has achieved significant milestones, including numerous innovations that have set industry standards. The company’s commitment to quality and technological advancement has solidified its market position, making it a trusted partner for businesses seeking reliable and cutting-edge manufacturing solutions.
0 vs industry average
Mks Instruments’s score of 31 is higher than 50% of the industry. This can give you a sense of how well the company is doing compared to its peers.
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Industry Intensity
Semiconductor Machinery Manufacturing has typical carbon intensity
Industry performance
The Semiconductor Machinery Manufacturing industry has reduced its overall emissions by 32% since 2019
Emissions trajectory 2020 – 2027
Reported emissions
Scope 3 accounts for ••• of total emissions.
Mks Instruments's reported carbon emissions
MKS Instruments's total carbon emissions in 2024 were approximately 2.83 billion kg CO2e. This figure includes Scope 1, Scope 2, and Scope 3 emissions. Scope 1 emissions were about 7.25 million kg CO2e, Scope 2 emissions (market-based) were approximately 57.12 million kg CO2e, and Scope 3 emissions accounted for the vast majority at around 2.76 billion kg CO2e. The primary driver of Scope 3 emissions was the use of sold products, contributing about 2.12 billion kg CO2e, followed by purchased goods and services at approximately 548.13 million kg CO2e. In 2023, MKS Instruments reported total emissions of approximately 2.24 billion kg CO2e. Scope 1 emissions were around 6.85 million kg CO2e, Scope 2 (market-based) were about 57.89 million kg CO2e, and Scope 3 emissions totalled approximately 2.18 billion kg CO2e. For this year, the use of sold products was the largest contributor to Scope 3 emissions at about 1.53 billion kg CO2e, with purchased goods and services at approximately 568.41 million kg CO2e. For 2022, MKS Instruments's total emissions were approximately 4.84 billion kg CO2e. Scope 1 emissions were around 8.21 million kg CO2e, Scope 2 (market-based) were approximately 58.95 million kg CO2e, and Scope 3 emissions were about 4.76 billion kg CO2e. The use of sold products was the most significant contributor to Scope 3 emissions at approximately 3.87 billion kg CO2e, followed by purchased goods and services at about 765.50 million kg CO2e. In 2021, the company reported total emissions of approximately 98.81 million kg CO2e. This included Scope 1 emissions of about 3.58 million kg CO2e and Scope 2 (location-based) emissions of approximately 65.19 million kg CO2e. Scope 3 data was partially disclosed, with upstream transportation and distribution at about 30.69 million kg CO2e and business travel at around 1.48 million kg CO2e. Purchased goods and services were noted as a missing data point for this year. For 2020, MKS Instruments's total emissions were approximately 31.35 million kg CO2e. This comprised Scope 1 emissions of about 2.32 million kg CO2e and Scope 2 (location-based) emissions of approximately 29.03 million kg CO2e. Business travel was the only reported Scope 3 category at around 1.61 million kg CO2e. Purchased goods and services were also a missing data point for this year. MKS Instruments has committed to reducing its combined Scope 1 and 2 greenhouse gas (GHG) emissions by 42% by 2030, using 2022 as the baseline year. This target is recognised by the Science Based Targets initiative (SBTi) as consistent with limiting warming to 1.5°C. The company also commits that 69.0% of its suppliers and customers by emissions, covering purchased goods and services and use of sold products, will have science-based targets by 2030. The company is noted as being on track for its two-year progress towards these targets.
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Mks Instruments’s Climate Goals (2030 & 2050)
No climate goals have been disclosed for Mks Instruments yet.
Scope 3 top emissions categories
8 of 15 categories disclosedSee all scope 3 categories
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Climate initiatives

Science Based Targets Initiative

Carbon Disclosure Project
The Climate Pledge
UN Global Compact Climate Champions initiative
RE 100
Climate Action 100
Emissions comparison with industry peers
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