Axcelis Technologies
Axcelis Technologies, Inc., a leading provider of ion implantation and other critical technologies for the semiconductor industry, is headquartered in the United States. Founded in 1978, the company has established itself as a key player in the development of advanced manufacturing equipment, particularly for the production of integrated circuits.
With a strong presence in major operational regions including North America, Europe, and Asia, Axcelis focuses on delivering innovative solutions that enhance semiconductor performance and yield. Their core products, such as the Purion series of ion implanters, are renowned for their precision and efficiency, setting them apart in a competitive market.
Axcelis has achieved significant milestones, including numerous patents and industry awards, solidifying its position as a trusted partner for semiconductor manufacturers worldwide.
+21 vs industry average
Axcelis Technologies’s score of 47 is higher than 69% of the industry. This can give you a sense of how well the company is doing compared to its peers.
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Industry Intensity
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Industry performance
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Emissions trajectory 2020 – 2027
Reported emissions
Scope 3 accounts for ••• of total emissions.
Axcelis Technologies's reported carbon emissions
In 2024, Axcelis Technologies, headquartered in the US, reported total greenhouse gas emissions of approximately 1.6 billion kg CO2e. This figure includes Scope 1 emissions of about 3.5 million kg CO2e, Scope 2 emissions of approximately 261,000 kg CO2e, and a significant contribution from Scope 3 emissions, which totalled around 1.6 billion kg CO2e. The Scope 3 emissions breakdown includes categories such as purchased goods and services (about 69.9 million kg CO2e) and downstream transportation and distribution (approximately 30.1 million kg CO2e). Axcelis has set ambitious climate commitments, aiming for net-zero greenhouse gas emissions across its entire value chain by 2050. The company has established near-term targets to reduce absolute Scope 1 and Scope 2 emissions by 65.88% by 2030, using 2022 as the base year. Additionally, it aims to reduce Scope 3 emissions from the use of sold products by 51.6% per USD value added within the same timeframe. For the long term, Axcelis targets a 90% reduction in absolute Scope 1 and Scope 2 emissions by 2050, alongside a 97% reduction in Scope 3 emissions per USD value added. These commitments align with the Science Based Targets initiative (SBTi) and reflect the company's dedication to addressing climate change within the semiconductor industry.
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Axcelis Technologies’s Climate Goals (2030 & 2050)
No climate goals have been disclosed for Axcelis Technologies yet.
Scope 3 top emissions categories
9 of 15 categories disclosedSee all scope 3 categories
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Climate initiatives

Science Based Targets Initiative

Carbon Disclosure Project
The Climate Pledge
UN Global Compact Climate Champions initiative
RE 100
Climate Action 100
Emissions comparison with industry peers
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Common questions about Axcelis Technologies’s sustainability data and climate commitments
Data year: 2024
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