Tokyo Electron Limited, commonly referred to as TEL, is a leading player in the semiconductor and flat panel display manufacturing equipment industry. Headquartered in Japan, TEL operates extensively across Asia, Europe, and North America, providing innovative solutions that drive technological advancement. Founded in 1963, Tokyo Electron has achieved significant milestones, including pioneering developments in photolithography and etching technologies. The company’s core products encompass a wide range of equipment for semiconductor fabrication, including deposition systems and cleaning tools, distinguished by their precision and efficiency. With a strong market position, TEL is recognised for its commitment to research and development, consistently delivering cutting-edge technologies that meet the evolving needs of the electronics industry. Its reputation for quality and innovation has solidified its status as a trusted partner for manufacturers worldwide.
How does Tokyo Electron's carbon action stack up? DitchCarbon scores companies based on their carbon action and commitment to reducing emissions. Read about our methodology to learn more.
Mean score of companies in the Electrical Machinery Manufacturing industry. Comparing a company's score to the industry average can give you a sense of how well the company is doing compared to its peers.
Tokyo Electron's score of 88 is higher than 93% of the industry. This can give you a sense of how well the company is doing compared to its peers.
In 2025, Tokyo Electron, headquartered in Japan (JP), reported significant carbon emissions, totalling approximately 12,741,000,000 kg CO2e globally. This includes 22,000,000 kg CO2e from Scope 1 emissions and 25,000,000 kg CO2e from Scope 2 emissions (market-based). In Japan, the company emitted about 11,000,000 kg CO2e in Scope 1 and 5,000,000 kg CO2e in Scope 2 (market-based). Tokyo Electron has set ambitious climate commitments, aiming for net-zero emissions across all scopes by 2040. The company has established a target to reduce absolute Scope 1 and 2 greenhouse gas emissions by 90% by FY2040 from a FY2018 baseline. Additionally, it aims to cut Scope 3 emissions by 90% from a FY2021 baseline. Near-term goals include a 70% reduction in Scope 1 and 2 emissions by FY2030 and a 55% reduction in Scope 3 emissions per wafer processed by FY2030. The company is also committed to increasing its sourcing of renewable electricity from 2% in FY2018 to 100% by FY2030. These targets align with the Science Based Targets initiative (SBTi) and reflect Tokyo Electron's dedication to sustainable practices within the semiconductor industry.
Access structured emissions data, company-specific emission factors, and source documents
| 2014 | 2015 | 2016 | 2017 | 2018 | 2019 | 2020 | 2021 | 2022 | 2023 | 2024 | 2025 | |
|---|---|---|---|---|---|---|---|---|---|---|---|---|
| Scope 1 | 11,000,000 | - | - | - | 0,000,000 | 00,000,000 | 00,000,000 | 00,000,000 | 00,000,000 | 00,000,000 | 00,000,000 | 00,000,000 |
| Scope 2 | 146,000,000 | 000,000,000 | 000,000,000 | 000,000,000 | 000,000,000 | 000,000,000 | 000,000,000 | 000,000,000 | 00,000,000 | 00,000,000 | 00,000,000 | 00,000,000 |
| Scope 3 | 3,651,000,000 | - | - | - | 00,000,000,000 | 0,000,000,000 | 0,000,000,000 | 0,000,000,000 | 00,000,000,000 | 00,000,000,000 | 00,000,000,000 | 00,000,000,000 |
Tokyo Electron's Scope 3 emissions, which increased by 7% last year and increased by approximately 248% since 2014, demonstrating supply chain emissions tracking. Nearly all of their carbon footprint comes from suppliers and value chain emissions, representing nearly all emissions under the GHG Protocol, with "Use of Sold Products" being the largest emissions source at 58% of Scope 3 emissions.
Climate goals typically focus on 2030 interim targets and 2050 net-zero commitments, aligned with global frameworks like the Paris Agreement and Science Based Targets initiative (SBTi) to ensure alignment with global climate goals.
Tokyo Electron has established climate goals through participation in recognized frameworks and target-setting initiatives. Companies often set interim 2030 targets and long-term 2050 net-zero goals to demonstrate measurable progress toward decarbonization.

Common questions about Tokyo Electron's sustainability data and climate commitments